Title:
研磨層用ポリウレタン，ポリウレタンを含む研磨層とその研磨層の改質方法，研磨パッド及び研磨方法
Document Type and Number:
Japanese Patent JPWO2018207670
Kind Code:
A1
Abstract:
シッフ塩基を有するジオールまたはその誘導体であるシッフ塩基含有鎖伸長剤、また、それを用いて製造されたポリウレタンとその改質方法、ポリウレタンを含む研磨層、その研磨層を用いた研磨方法。
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Inventors:
Azusa Oshita
Minoru Takekoshi
Mitsuru Kato
Tomotaka Okamoto
Shinya Kato
Minoru Takekoshi
Mitsuru Kato
Tomotaka Okamoto
Shinya Kato
Application Number:
JP2019517573A
Publication Date:
April 02, 2020
Filing Date:
April 27, 2018
Export Citation:
Assignee:
KURARAY CO.,LTD.
International Classes:
C08G18/65; B24B37/12; B24B37/24; H01L21/304
Other References:
KAUSAR, A. ET AL.: "An investigation on new high performance Schiff base polyurethanes", HIGH PERFORMANCE POLYMERS, vol. 24, no. 2, JPN6018024173, 2012, pages 125 - 134, ISSN: 0004656896
SIMIONESCU, C. I. ET AL.: "Urethanic compounds with Schiff base structure", MAT RES INNOVAT, vol. 4, JPN6021048809, 2001, pages 161 - 165, XP055561714, ISSN: 0004656897, DOI: 10.1007/s100190000083
SIMIONESCU, C. I. ET AL.: "Urethanic compounds with Schiff base structure", MAT RES INNOVAT, vol. 4, JPN6021048809, 2001, pages 161 - 165, XP055561714, ISSN: 0004656897, DOI: 10.1007/s100190000083
Attorney, Agent or Firm:
Masaru Egawa
Michiko Furukawa
Michiko Furukawa