Document Type and Number:
Japanese Patent JPWO2021130891
Kind Code:
A1
Abstract:
A substrate conveyance device comprising: a pair of conveyance belts that convey a substrate with both ends of said substrate being placed thereon; a driving unit that drives the pair of conveyance belts in a conveyance direction; a pair of wall-like substrate guides that are provided outside the pair of conveyance belts, respectively and that guide the substrate in the conveyance direction; first clamp plates that extend inward from the respective upper end surfaces of the pair of substrate guides; second clamp plates that are provided vertically below the respective rear surfaces of the pair of conveyance belts; a plurality of belt guide rollers that are respectively provided to a plurality of U-shaped cutout sections formed at upper end parts of the second clamp plates and that are fixed to the substrate guides; an ascent and descent part that, by lowering the pair of substrate guides, clamps the substrate placed on the pair of conveyance belts by using the first clamp plates and the second clamp plates; and a control unit that controls pressure during clamp by the ascent and descent part, wherein the belt guide rollers protrude from the upper end parts of the second clamp plates during non-clamp by the ascent and descent part.
Application Number:
JP2021566630A
Publication Date:
July 01, 2021
Filing Date:
December 25, 2019
Export Citation:
Domestic Patent References:
| JP2015035457A | 2015-02-19 |
Foreign References:
| WO2018235155A1 | 2018-12-27 | |||
| US20060105612A1 | 2006-05-18 |