Document Type and Number:
Japanese Patent JPWO2022024888
Kind Code:
A1
Abstract:
The probe guide (30) according to the present disclosure guides a probe pin (20), the probe guide (30) comprising a base (31) that is formed from a ceramic and that has a plurality of through-holes (32) in which the probe pin (20) is inserted. The base (31) has a SiO film (33) in at least some of the through-holes (32).
Application Number:
JP2022540228A
Publication Date:
February 03, 2022
Filing Date:
July 20, 2021
Export Citation:
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