Document Type and Number:
Japanese Patent JPWO2022172438
Kind Code:
A1
Abstract:
Provided is an abrasive agent for tungsten materials, the abrasive agent comprising abrasive grains, an ammonium salt, an iron-containing compound and an oxidizing agent, in which the abrasive grains have a positive zeta potential and the content of the ammonium salt is 0.01% by mass or more and less than 0.20% by mass relative to the whole mass of the abrasive agent. Also provided is an abrading method, the method comprising abrading a surface of interest with the abrasive agent.
Application Number:
JP2022507376A
Publication Date:
August 18, 2022
Filing Date:
February 15, 2021
Export Citation:
Domestic Patent References:
| JP2009530848A | 2009-08-27 | |||
| JP2020534679A | 2020-11-26 | |||
| JP2017061612A | 2017-03-30 | |||
| JP2000144109A | 2000-05-26 |
Foreign References:
| US20200208014A1 | 2020-07-02 |