Document Type and Number:
Japanese Patent JPWO2022190711
Kind Code:
A1
Abstract:
A vaporizer 10 comprises: a vaporization chamber 12 for storing a liquid; a bottom heater 14B provided in the vaporization chamber 12 which includes a winding portion 141, acting as a heat source, to contact with the liquid stored in the vaporization chamber and an upright portion 142 erected from the winding portion and having an end portion with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to appropriately vaporize and supply ultrapure water.
Application Number:
JP2023505206A
Publication Date:
September 15, 2022
Filing Date:
February 01, 2022
Export Citation:
