Title:
2-axis stepper device
Document Type and Number:
Japanese Patent JP6328948
Kind Code:
B2
Inventors:
Kazushi Kondo
Toshihiro Kurii
Toshihiro Kurii
Application Number:
JP2014021851A
Publication Date:
May 23, 2018
Filing Date:
February 07, 2014
Export Citation:
Assignee:
NEC Space Technologies, Ltd.
International Classes:
H02K41/03; H02K37/14
Domestic Patent References:
| JP62081970A | ||||
| JP2008211876A | ||||
| JP11288317A |
Attorney, Agent or Firm:
Masahiko Desk
Naoki Shimosaka
Naoki Shimosaka
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