Title:
2次元絶対位置検出装置及び2次元絶対位置検出方法
Document Type and Number:
Japanese Patent JP4463612
Kind Code:
B2
Abstract:
An absolute 2D position-sensing device is usable to measure the position of a first element with respect to a second element. A 2D absolute scale (110) includes an integrated 2D absolute scale pattern (300) extending over the 2D scale area along each measuring axis of the scale. The integrated 2D absolute scale pattern (300) includes a predetermined quasi-random pattern repeatedly interleaved with a plurality of code portions along each axis. Each code portion includes a plurality of code elements indicative of an absolute measurement value. The offset of the quasi-random pattern relative to a readhead of the device is combined with the absolute measurement value to determine an absolute position to a very high resolution over a relatively large 2D range.
Inventors:
Benjamin K Jones
Michael nayham
Michael nayham
Application Number:
JP2004136644A
Publication Date:
May 19, 2010
Filing Date:
April 30, 2004
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B11/00; G01D5/245; G01D5/347
Domestic Patent References:
| JP2001194187A | ||||
| JP11248489A |
Foreign References:
| US20030026457 |
Attorney, Agent or Firm:
Masaru Itami