Title:
THREE-DIMENSIONAL SHAPE MEASURING METHOD AND THREE-DIMENSIONAL SHAPE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2022103954
Kind Code:
A
Abstract:
To provide a three-dimensional shape measuring method and a three-dimensional shape measuring device that can measure a three-dimensional shape of an object with high measurement accuracy regardless of a shape of the object.SOLUTION: A three-dimensional shape measuring method includes the steps of: when rays of light in two colors included in the three primary colors of light are defined as first light and second light, arranging a projector that makes a first grating pattern formed by the first light and a second grating pattern formed by the second light orthogonal to each other and project the grating patterns on a reference surface, and a camera that picks up images of the first grating pattern and the second grating pattern, on a base line intersecting with the grating patterns at an angle of 45°; projecting the grating patterns; picking up images of the first grating pattern and the second grating pattern projected on an object; performing phase analysis of a lattice image to calculate height information; and when increasing a range for measuring the height information, reducing a distance between the projector and the camera, and when reducing the measuring range, increasing the distance.SELECTED DRAWING: Figure 15
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Inventors:
NARIMATSU SHUJI
HORIGUCHI HIROSADA
HORIGUCHI HIROSADA
Application Number:
JP2020218882A
Publication Date:
July 08, 2022
Filing Date:
December 28, 2020
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01B11/25
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura