Title:
レーザシステム性能を改善するためのAOM変調技術
Document Type and Number:
Japanese Patent JP5492763
Kind Code:
B2
Inventors:
Johnson, jay
Wat, david
Baird, Brian
Harris, Richard
Wat, david
Baird, Brian
Harris, Richard
Application Number:
JP2010287047A
Publication Date:
May 14, 2014
Filing Date:
December 24, 2010
Export Citation:
Assignee:
Electro Scientific Industries, Inc.
International Classes:
G02F1/11; B23K26/06; B23K26/08; G01N23/04; G02F1/33
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Attorney, Agent or Firm:
Hidekazu Miyoshi
Masakazu Ito
Yuko Hara
Nobuyuki Matsunaga
Hidehiko Nakamura
Masakazu Ito
Yuko Hara
Nobuyuki Matsunaga
Hidehiko Nakamura