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Title:
パシベーション膜が積層された基板のアブレーション加工方法
Document Type and Number:
Japanese Patent JP5885454
Kind Code:
B2
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Inventors:
Nobuyasu Kitahara
Application Number:
JP2011221722A
Publication Date:
March 15, 2016
Filing Date:
October 06, 2011
Export Citation:
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Assignee:
Disco Co., Ltd.
International Classes:
B23K26/36; B23K26/00; B23K26/18; B23K26/402; B28D5/00
Domestic Patent References:
JP2005353935A
JP2004330236A
JP2010207723A
JP2009544145A
Attorney, Agent or Firm:
Akira Matsumoto
Hiroshi Oue



 
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