ABNORMAL DISCHARGE QUENCHING DEVICE FOR VACUUM EQUIPMENT

Japanese Patent JP3660018

B2

PURPOSE: To prevent interruption of the power supply to an vacuum equipment over a long period of time from occurring by closing a switch connected to a load-connecting circuit in parallel with the vacuum equipment when any change in load voltage due to an abnormal discharge is detected.
CONSTITUTION: In this device, a switch 23 and electric resistance 22 are connected to a load- connecting circuit for connecting a DC power source 1 to a vacuum equipment 3, in parallel with the vacuum equipment 3. When any change in load voltage due to an abnormal discharge in the vacuum equipment 3 occurs, the abnormality is detected by an abnormal discharge voltage detector 17 and the change in load current value to an overcurrent level is detected by a current detector 13. When the abnormal signals from the detectors 13 and 17 are received by a control circuit 14, the output of the DC power source 1 is reduced and concurrently, the switch 23 is closed by the control circuit 14. At this time, the energy accumulated in reactors 8 and condensers 9 is consumed by the resistance 22. Accordingly, the output of the DC power source 1 is reduced in a short time and the vacuum equipment 3 is returned to the constant-power operation at once. Thus, the interruption of power supply from the power source 1 over a long period of time of the order of several milliseconds is prevented from occurring and the operation of the vacuum equipment 3 can be performed almost without any dead time.

Hisao Yamaguchi

JP11841895A

June 15, 2005

May 17, 1995

Click for automatic bibliography generation  

ULVAC, Inc.

C23C14/54; C23C14/34; C23F4/00; H05H1/46; (IPC1-7): C23C14/34; C23F4/00; H05H1/46

JP8222398A
JP7233472A
JP7062521A
JP7078697A

Kinichi Kitamura
Tashiro Sakuo
Etsuo Machida

Previous Patent: HYDRAULIC PUNCHING PRESS

Next Patent: FLOOR-SUPPORTING LEG