Title:
基板搬送装置および基板搬送装置の異常検出方法
Document Type and Number:
Japanese Patent JP6965378
Kind Code:
B2
Abstract:
To understand the signs of defects in board transfer.SOLUTION: A substrate transfer device according to an embodiment includes a transport device, a support unit, a control unit, and a detection mechanism. The transfer device includes a holding unit on which a substrate can be placed and held, and is provided so as to be movable in the horizontal direction and the vertical direction. The support unit is provided so as to be able to move up and down to a predetermined height between the upper surface of the holding unit and the back surface of the substrate, and supports the mounted substrate from below. The control unit controls the raising/lowering operation of the support unit. The detection mechanism detects an up/down state of the support unit.SELECTED DRAWING: Figure 5
Inventors:
Katsuhiro Morikawa
Tokutaro Hayashi
Tokutaro Hayashi
Application Number:
JP2020007202A
Publication Date:
November 10, 2021
Filing Date:
January 21, 2020
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; B25J9/02; B65G1/00; B65G49/07
Domestic Patent References:
| JP11031732A | ||||
| JP2014127635A | ||||
| JP2002313893A | ||||
| JP2002196815A | ||||
| JP2008235841A | ||||
| JP2001287178A | ||||
| JP6246658A | ||||
| JP7297154A | ||||
| JP10270529A | ||||
| JP2002164411A |
Foreign References:
| US20100034621 |
Attorney, Agent or Firm:
Sakai International Patent Office
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