研磨剤組成物、その製造方法及び研磨方法

Title:

研磨剤組成物、その製造方法及び研磨方法

Document Type and Number:

Japanese Patent JPWO2004030062

Kind Code:

A

Inventors:

Katsuyuki Tsugita
Hiroyuki Kamiya

Application Number:

JP2003012258W

Publication Date:

April 08, 2004

Filing Date:

September 25, 2003

Export Citation:

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Assignee:

SEIMI CHEMICAL, Inc.
Asahi Glass Co., Ltd.

International Classes:

H01L21/304; C09K3/14; B24B37/00

Attorney, Agent or Firm:

Kenji Doi
Wood Tsunenori
Takamasa Asano

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