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Title:
ABRASIVE GRAIN CLASSIFICATION PROCESS AND DEVICE FOR THE SAME
Document Type and Number:
Japanese Patent JP2002136895
Kind Code:
A
Abstract:

To provide an abrasive grain classification process by which very fine abrasive grains can be classified with high accuracy and in an enhanced yield, so that the grain size distribution of the resulting classified abrasive grains is controlled with high accuracy.

This classification process comprises: introducing portions of a prescribed amount of abrasive grains into a feed section 12; in the feed section 12, providing each of the abrasive grains with electrostatic charge by blowing gaseous nitrogen; transferring the charged abrasive grains to an acceleration section 13 through a blowout port 18, to accelerate the charged abrasive grains in a specified direction; thereby allowing the abrasive grains each having specified kinetic energy to fly toward the other end of the acceleration section 13; and capturing each of the abrasive grains in a capture section 14; wherein in the capture section 14, by charging each of pockets 20A, 20B, etc., through conduction so as to have opposite charge to the charge of the abrasive grains, the abrasive grains are attracted by the pockets 20A, 20B, etc., and also, since the direction of motion of each of the abrasive grains is changed by Lorentz force and curvature of the locus of motion of each of the abrasive grains becomes different from those of the others because of the difference in mass of the abrasive grains from each other, each of the abrasive grains flying to the capture section 14, can be captured in the corresponding one of the pockets 20A, 20B, etc., separately from the others. Thus, such abrasive grains can be classified with high accuracy and in an enhanced yield.


Inventors:
Sugitani, Kazuaki
Fukumoto, Hayaaki
Fukuhara, Fumiya
Application Number:
JP2000000333400
Publication Date:
May 14, 2002
Filing Date:
October 31, 2000
Export Citation:
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Assignee:
MITSUBISHI MATERIALS SILICON CORP
International Classes:
B07B7/01; B03C1/00; B03C1/02; B03C7/02; B07B11/00; B07B7/00; B03C1/00; B03C1/02; B03C7/00; B07B11/00; (IPC1-7): B03C7/02; B03C1/00; B03C1/02; B07B7/01; B07B11/00