Title:
研磨液組成物
Document Type and Number:
Japanese Patent JP4076853
Kind Code:
B2
Inventors:
Hiroaki Kitayama
Shigeo Fujii
Shigeo Fujii
Application Number:
JP2002376456A
Publication Date:
April 16, 2008
Filing Date:
December 26, 2002
Export Citation:
Assignee:
Kao Corporation
International Classes:
C09K3/14; B24B37/00; G11B5/84
Domestic Patent References:
| JP200212855A | ||||
| JP200164632A | ||||
| JP11293231A | ||||
| JP2001214155A | ||||
| JP1188264A | ||||
| JP2000323444A | ||||
| JP200185372A | ||||
| JP200220732A | ||||
| JP2002327170A | ||||
| JP200189746A | ||||
| JP200185376A |
Attorney, Agent or Firm:
Yoshinori Hosoda