To perform CMP having high working accuracy by the uniforming or the like of grain sizes of abrasive grains included in an abrasive material.

A material obtained by dispersing fullerene or a fullerene compound into a solvent as the abrasive material is used as abrasive. The fullerene to be used for the abrasive is an associated substance having a required grain size by mixing an organic solvent into which the fullerene is solved and alcohol at a prescribed rate. Alternatively, it is also available to mix the fullerence formed so as to have the required grain size or its compound into conventional abrasive.