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Patent Searching and Data


Title:
ABRASIVE FOR PROBE OF PROBE CARD
Document Type and Number:
Japanese Patent JPH10300777
Kind Code:
A
Abstract:

To ensure a long service life of a probe while removing foreign matters adhering thereto by providing an abrasive layer comprising a fine abrasive grain layer arranged on a basic material, and a cushion layer exhibiting elasticity and shock absorbability.

An abrasive layer 3 comprising an abrasive grain layer 2 arranged on a basic material 1. Preferably, the basic material 1 can impart a constant rigidity entirely to an abrasive in order to fix the abrasive to a dedicated machine along with a probe card and to move or mount/demount the abrasive automatically. Abrasive grains to be employed in the abrasive grain layer 2 are selected to have such a means grain size as the shape on the surface of the abrasive layer 3 matches to the irregularities of a probe. The means grain size is preferably set in the range of 0.5-3 μm. A cushion layer 4 has elasticity and shock absorbability required for protecting the probe against damage or degradation of shape when the abrasive layer 3 touches the probe and an acryl based resin is employed, for example. Since double structure of the abrasive layer 3 and the cushion layer 4 is employed, a moderate rigidity, elasticity and shock absorbability are provided in combination.


Inventors:
Kamata, Naoya
Maeda, Toshirou
Tanaka, Kazuo
Yoshizumi, Reiji
Application Number:
JP1997000104193
Publication Date:
November 13, 1998
Filing Date:
April 22, 1997
Export Citation:
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Assignee:
SUMITOMO 3M LTD
NEC KYUSHU LTD
International Classes:
G01R1/06; B24B19/16; B24D3/00; B24D3/32; B24D11/00; B24D15/04; H01L21/304; H01L21/66; (IPC1-7): G01R1/06; H01L21/304; H01L21/66
Attorney, Agent or Firm:
渡辺 喜平 (外1名)