Title:
金平糖状無機酸化物ゾル、その製造方法および前記ゾルを含む研磨剤
Document Type and Number:
Japanese Patent JP4907317
Kind Code:
B2
Abstract:
The present invention provides a sol of spinous inorganic oxide particles not containing coarse particles, in which particles having extremely homogeneous particles are dispersed in a solvent. An acidic silicic acid is added to a dispersion liquid of core particles to grow core particles, and then again the acidic silicic acid is added at the addition rate 1.2 to 1.8 higher than that in the previous step to prepare a sol of spinous inorganic oxide particles. Then the sol is subjected to centrifugation to remove coarse particles having the diameter of 800 nm or more, thus spinous inorganic oxide particles having peculiar form such as a spinous one being obtained.
Inventors:
Kazuhiro Nakayama
Tokunaga Mami
Akira Nakajima
Kazuaki Inoue
Osamu Yoshida
Yoshinori Wakamiya
Hiroyasu Nishida
Tokunaga Mami
Akira Nakajima
Kazuaki Inoue
Osamu Yoshida
Yoshinori Wakamiya
Hiroyasu Nishida
Application Number:
JP2006323554A
Publication Date:
March 28, 2012
Filing Date:
November 30, 2006
Export Citation:
Assignee:
JGC Catalysts Co., Ltd.
International Classes:
C01B33/143; A23L1/00; A23L2/38; A23L2/70; A23L27/50; A23L29/00; C09K3/14; C12G1/00; C12G3/00; C12G3/02; C12G3/08; C12J1/04; H01L21/304
Domestic Patent References:
| JP2008169102A | ||||
| JP2004035293A | ||||
| JP2002038049A | ||||
| JP2003212534A | ||||
| JP2006080406A | ||||
| JP2003026417A | ||||
| JP2003109921A | ||||
| JP2006213541A | ||||
| JP2001352966A |
Attorney, Agent or Firm:
Masahisa Ishida