Title:
合成石英ガラス基板用研磨剤
Document Type and Number:
Japanese Patent JP5407555
Kind Code:
B2
Inventors:
Daimi Harada
Masaki Takeuchi
Yukio Shibano
Shuhei Ueda
Atsushi Watanabe
Masaki Takeuchi
Yukio Shibano
Shuhei Ueda
Atsushi Watanabe
Application Number:
JP2009127437A
Publication Date:
February 05, 2014
Filing Date:
May 27, 2009
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
B24B37/00; C09K3/14
Domestic Patent References:
| JP2002180034A | ||||
| JP2008074990A | ||||
| JP2008063182A | ||||
| JP2007191696A | ||||
| JP2005217002A | ||||
| JP2003031528A | ||||
| JP2006193695A | ||||
| JP2005103684A | ||||
| JP2006128552A | ||||
| JP2002030274A | ||||
| JP2005034986A |
Foreign References:
| WO2008044477A1 |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa