Title:
研磨材、研磨工具及び研磨方法
Document Type and Number:
Japanese Patent JP4405603
Kind Code:
B2
Inventors:
Water supply
Fumihiko Sato
Fumihiko Sato
Application Number:
JP12243598A
Publication Date:
January 27, 2010
Filing Date:
May 01, 1998
Export Citation:
Assignee:
3M COMPANY
International Classes:
B24D3/00; B24D7/00; B24D15/02
Domestic Patent References:
| JP62259759A | ||||
| JP62213971A | ||||
| JP8511733A | ||||
| JP49103093U | ||||
| JP63057060U | ||||
| JP10058333A | ||||
| JP61050660U | ||||
| JP11099452A | ||||
| JP49028594U | ||||
| JP6031955U |
Attorney, Agent or Firm:
Ippei Watanabe
Koji Kikawa
Koji Kikawa