Title:
研摩材および研摩スラリー
Document Type and Number:
Japanese Patent JP6744295
Kind Code:
B2
Abstract:
An abrasive according to an embodiment includes a polymer additive and abrasive grains for polishing a substrate. The abrasive grains include manganese oxide.
Inventors:
Matsuyama Masayuki
Application Number:
JP2017509497A
Publication Date:
August 19, 2020
Filing Date:
March 11, 2016
Export Citation:
Assignee:
Mitsui Mining & Smelting Co., Ltd.
International Classes:
C09K3/14; B24B37/00; C09G1/02; H01L21/304
Domestic Patent References:
| JP2000160138A | ||||
| JP200910031A | ||||
| JP2009218288A | ||||
| JP2013122795A | ||||
| JP2012696A | ||||
| JP2014118468A | ||||
| JP2015189806A |
Foreign References:
| WO2013088928A1 | ||||
| WO2008102672A1 | ||||
| WO2013035545A1 | ||||
| WO2011125254A1 | ||||
| WO2013180079A1 |
Other References:
ライオン・スペシャリティ・ケミカルズ株式会社,ポリティA-550安全データシート,2014年12月11日(参考文献)
Attorney, Agent or Firm:
Sakai International Patent Office