Title:
AC SIGNAL MEASURING APPARATUS
Document Type and Number:
Japanese Patent JP2013195222
Kind Code:
A
Abstract:
To calculate an effective value and a phase difference of an AC signal easily.
When an AC voltage and an AC signal are detected and then filter sections 51 and 52 extract a fundamental wave component, arithmetic processing in the filter sections 51 and 52 is performed by an expression (a1). Each of the filter sections 51 and 52 outputs a cosine wave and a sine wave of the fundamental wave component of an input, effective value computation sections 53 and 54 calculates AC voltage and an effective value of the AC voltage, and a phase difference computation section 55 calculates a phase difference φ.
Inventors:
OHORI AKIHIRO
HATTORI MASAYUKI
HATTORI MASAYUKI
Application Number:
JP2012062390A
Publication Date:
September 30, 2013
Filing Date:
March 19, 2012
Export Citation:
Assignee:
DAIHEN CORP
International Classes:
G01R19/02; G01R25/00; H01L21/3065
Domestic Patent References:
| JPH10163811A | 1998-06-19 | |||
| JP2011075018A | 2011-04-14 | |||
| JPH10163811A | 1998-06-19 | |||
| JP2011075018A | 2011-04-14 |
Attorney, Agent or Firm:
Minoru Yoshida
Tatsuya Tanaka
Tsukasa Senba
Yasumitsu Suzuki
Nao Usui
Tatsuya Tanaka
Tsukasa Senba
Yasumitsu Suzuki
Nao Usui