Title:
ACCELERATION SENSOR DEVICE
Document Type and Number:
Japanese Patent JP2000088877
Kind Code:
A
Abstract:
To provide a small-sized high-reliable acceleration sensor device.
This acceleration sensor device 1 is composed by including a silicon chip 2 in which an acceleration sensor part 4 by using a strain gauge is formed. In the silicon chip 2, an acceleration switch part 5, having such a system that a moving part M2 is moved by application of an acceleration and that hereby contacts 25, 34 are opened or closed, is formed.
Inventors:
MURATE MAKOTO
IWATA HITOSHI
IWATA HITOSHI
Application Number:
JP25517798A
Publication Date:
March 31, 2000
Filing Date:
September 09, 1998
Export Citation:
Assignee:
TOKAI RIKA CO LTD
International Classes:
B60R21/16; B81C3/00; G01P15/12; G01P15/135; H01H35/14; H01L29/84; (IPC1-7): G01P15/135; B60R21/32; G01P15/12; H01H35/14; H01L29/84
Attorney, Agent or Firm:
Hironobu Onda