Title:
ACCELERATION SENSOR ELEMENT AND ACCELERATION SENSOR USING THE SAME
Document Type and Number:
Japanese Patent JP2014224682
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an acceleration sensor with high sensitivity used for a vehicle, a mobile terminal, and the like.SOLUTION: An acceleration sensor comprises: an outer frame part; a weight part arranged at a center part of the outer frame part, in which an X-axis and a Y-axis orthogonal to each other are defined at the center of the weight part; a pair of X-axis flexible parts of which a center line in a width direction is the X-axis, and which connects the outer frame part and the weight part; a pair of Y-axis flexible parts of which a center line in a width direction is the Y-axis, and which connects the outer frame part and the weight part; and first to fourth X-axis resistance elements that are arranged in the X-axis flexible parts and detect acceleration components in the X-axis direction. The first to fourth X-axis resistance elements are each made up of a pair of strain registers, the second X-axis resistance element is arranged in an inner side of the first X-axis resistance element, the first X-axis resistance element and the third X-axis resistance element are arranged in line symmetry relative to the Y-axis, and the second X-axis resistance element and the fourth X-axis resistance element are arranged in line symmetry relative to the Y-axis.
Inventors:
MORINAKA KATSUYA
NAKAMURA DAISUKE
NAKAMURA DAISUKE
Application Number:
JP2013102726A
Publication Date:
December 04, 2014
Filing Date:
May 15, 2013
Export Citation:
Assignee:
PANASONIC CORP
International Classes:
G01P15/12; G01P15/18; H01L29/84
Attorney, Agent or Firm:
Hiroki Naito
Fujii Kentaro
Terauchi Italian 久郎
Fujii Kentaro
Terauchi Italian 久郎