Title:
ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JP2002156386
Kind Code:
A
Abstract:
To provide a small acceleration sensor having high detection sensitivity and directional and omnidirectional detection sensitivity as turning into high performance.
This acceleration sensor is provided with a vibrator, having polarization in one direction and a weight part provided continuously with the vibrator. The weight part is supported in a position different from an overall center of gravity position including weights of the vibrator and the weight part itself, and the direction of the polarization axis of the vibrator is formed, so as to match or to be different from the axis of slip vibration of the vibrator.
Inventors:
TANAKA HIROSHI
SAWADA KATSUHIRO
YANAI MASAKI
ONO MASAAKI
ISHIKAWA HIROSHI
SAWADA KATSUHIRO
YANAI MASAKI
ONO MASAAKI
ISHIKAWA HIROSHI
Application Number:
JP2000351058A
Publication Date:
May 31, 2002
Filing Date:
November 17, 2000
Export Citation:
Assignee:
FUJITSU LTD
FUJITSU MEDIA DEVICE KK
FUJITSU MEDIA DEVICE KK
International Classes:
G01P15/09; G01P15/097; G01P15/10; G01P15/18; H01L41/08; (IPC1-7): G01P15/09; G01P15/18; H01L41/08
Attorney, Agent or Firm:
Tsunede Hayashi (1 person outside)
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