Title:
ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JP2005070018
Kind Code:
A
Abstract:
To provide a small-sized semiconductor capacity type sensor of high sensitivity.
A surface area of a weight faced to a detecting electrode is widened to enhance the detection sensitivity even when reducing a size of the sensor.
Inventors:
SHODA MITSUO
SUDO MINORU
KATO KENJI
SUDO MINORU
KATO KENJI
Application Number:
JP2003304130A
Publication Date:
March 17, 2005
Filing Date:
August 28, 2003
Export Citation:
Assignee:
SEIKO INSTR INC
International Classes:
G01C19/56; B81B3/00; G01P15/125; H01L29/84; (IPC1-7): G01P15/125; B81B3/00; G01C19/56; G01P9/04; H01L29/84
Attorney, Agent or Firm:
Yoshiharu Matsushita
Previous Patent: LIGHTING SYSTEM AND LIGHTING METHOD
Next Patent: BLOOD COMPATIBILITY EVALUATING METHOD
Next Patent: BLOOD COMPATIBILITY EVALUATING METHOD