To obtain an acceleration sensor which has a high detection resolution in a low acceleration domain and has a wide detection range.
An acceleration sensor comprises a pair of first drive electrodes 11a, 11b which are provided to face a detection frame 7 at an interval d11 (a first interval) interposed therebetween and drive the detection frame 7 by applying a voltage thereto, a pair of second drive electrodes 12a, 12b which are provided to face the detection frame 7 with an interval d12 (a second interval) interposed therebetween and drive the detection frame 7 by applying a voltage thereto, a capacitance/voltage conversion circuit 20 (detection means) which detects a displacement of the detection frame 7, and a servo control circuit 30 (control means) which applies the voltage to the first drive electrodes 11a, 11b or the second drive electrodes 12a, 12b in accordance with output of the capacitance/voltage conversion circuit 20 and controls to drive the detection frame 7 to a predetermined position. The acceleration sensor is configured to detect an applied acceleration on the basis of the voltage applied to drive the detection frame 7 to the predetermined position.
HIRATA YOSHIAKI
| JP2007274362A | 2007-10-18 | |||
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| WO2010026843A1 | 2010-03-11 | |||
| US20080098815A1 | 2008-05-01 |
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka
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