Title:
加速度センサ
Document Type and Number:
Japanese Patent JP4156946
Kind Code:
B2
Abstract:
In a movable space, a boundary (CN 1 ) between a ceiling surface and a wall surface of a cap (CA) has a curved plane. When stress is exerted on the cap (CA), this stress is dispersed accordingly around the boundary (CN 1 ) having a high probability of generation of a crack. Therefore, generation of a crack in the cap (CN) is unlikely.
Inventors:
Nagaaki Teruaki
Application Number:
JP2003048444A
Publication Date:
September 24, 2008
Filing Date:
February 26, 2003
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01P15/08; G01P15/125; B81B7/00; G01H1/08; G01P1/02; H01L29/84
Domestic Patent References:
| JP2000243976A | ||||
| JP2000164741A | ||||
| JP8032088A | ||||
| JP2001337103A | ||||
| JP2001332746A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita