Title:
化学物質の正確な容量測定希釈/混合のための方法および装置
Document Type and Number:
Japanese Patent JP3586776
Kind Code:
B2
Abstract:
Apparatus and method for accurate measuring and mixing of chemicals is disclosed. The apparatus includes one or more metered vessels having a container of predetermined volume and at least one constricted vent tube therein. By mounting a sensor on the constricted vent tube, a greatly amplified measurement of the precise chemical volume in the metered vessel is provided. The apparatus and method of the present invention readily lends itself to a variety of applications and can be adapted to handle virtually any form of chemical mixing, diluting, or generating process.
Inventors:
Bernoskey, Jugen W.
Geats, Jay Tobin
Feri, Edward T. Jr.
Robertson, Glenn A. Jr.
Geats, Jay Tobin
Feri, Edward T. Jr.
Robertson, Glenn A. Jr.
Application Number:
JP52130294A
Publication Date:
November 10, 2004
Filing Date:
March 22, 1994
Export Citation:
Assignee:
Applied Chemical Solutions
International Classes:
B01F15/04; B01J4/00; B24B37/04; B67D7/02; G01N1/00; B67D7/74; F17D1/08; G01F11/28; G01F23/00; G01F23/02; H01L21/00; (IPC1-7): F17D1/08; B01J4/00; B67D5/56
Domestic Patent References:
| JP51034922Y1 |
Foreign References:
| WO1992005406A1 |
Attorney, Agent or Firm:
Calyx
Toshio Nakamura
Toshio Nakamura