Title:
酸発生剤、スルホン酸とその誘導体および感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP4329462
Kind Code:
B2
Inventors:
Eiji Yoneda
Rui Ebata
Wang Yong
Rui Ebata
Wang Yong
Application Number:
JP2003312281A
Publication Date:
September 09, 2009
Filing Date:
September 04, 2003
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C07C309/19; G03F7/004; C07C23/38; C07C309/80; C07C381/12; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
| JP2004210670A | ||||
| JP2004002252A |
Foreign References:
| WO2004078703A1 |
Other References:
Journal of Organic Chemistry,1994年,59(4),p.854-857
Attorney, Agent or Firm:
Toshiaki Fukuzawa