Title:
ACOUSTIC VIBRATION TYPE VACUUM GAUGE
Document Type and Number:
Japanese Patent JPS6098327
Kind Code:
A
Abstract:
PURPOSE: To quicken response speed and to measure precisely a vacuum degree by detecting an acoustic impedance of a gas seen from a mechanical vibration part varying with the vacuum degree.
CONSTITUTION: AC signal generated from an oscillator 21 is impressed to a transmitting transducer 11 existing in a space 1. Acoustic wave generated from the transducer 11 is attained to a receiving transducer 12. An output signal of the transducer 12 is amplified and detected by a synchronous amplifying detector 31 by an output of the oscillator 21 given through a phase controller 23. The detected output is given to an indicating meter 32, and the vacuum degree of the space 1 is read.
Inventors:
OOGA TOSHIROU
YOSHIKAWA SHIYOUKICHIROU
YAMASHITA TSUTOMU
YOSHIKAWA SHIYOUKICHIROU
YAMASHITA TSUTOMU
Application Number:
JP20665783A
Publication Date:
June 01, 1985
Filing Date:
November 02, 1983
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G01L11/00; G01L9/00; G01L21/00; G01L21/08; (IPC1-7): G01L9/00; G01L21/00
Attorney, Agent or Firm:
Kusano Takashi