Title:
ACTIVATING METHOD FOR PLURAL PHOTOCATHODES
Document Type and Number:
Japanese Patent JP3886228
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for simultaneously forming activation layers onto the photoelectron emitting surfaces of plural of photocathodes.
SOLUTION: A substantially spatially uniform activator gas flow is diffused toward a plurality of photocathodes 10a-10d placed inside a vacuum chamber 40, the total response-to-light ratio of the plurality of photocathodes 10a-10d is monitored by a monitoring device 50, and when the desired total response-to- light ratio is obtained, diffusion of the activator gas flow is terminated. For the activator gas, a first gas comprising cesium or barium gas and a second gas comprising oxygen or fluorine gas is used, the first gas being supplied in a proportion that is unvarying with time, the second gas being supplied in a proportion that varies with time and uniformly diffused as it is adjusted so that the desired total response-to-light ratio can be obtained.
Inventors:
Robert Peckman
Donald H. Stanley
Roger S. Boss
Joseph Hermann Like Jr.
Donald H. Stanley
Roger S. Boss
Joseph Hermann Like Jr.
Application Number:
JP30110197A
Publication Date:
February 28, 2007
Filing Date:
October 31, 1997
Export Citation:
Assignee:
IT Manufacturing Enterprises Incorporated
International Classes:
H01J9/12; C23C14/08; C23C14/50; H01J1/34; H01J40/06; (IPC1-7): H01J9/12; H01J1/34; H01J40/06
Domestic Patent References:
| JP6300657A | ||||
| JP4217042B1 | ||||
| JP6132375A |
Foreign References:
| US4999211 |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Toshio Shirane
Sadao Muramatsu
Ryo Hashimoto
Toshio Shirane