Title:
ACTIVE DEVICE
Document Type and Number:
Japanese Patent JPH04338731
Kind Code:
A
Abstract:
PURPOSE:To improve the adhesive strength between a 1st wiring layer and a ferroelectric layer and to prevent the layers from peeling off at a device active part by forming an insulating layer, the 1st wiring part, the ferroelectric conductor layer, and a 2nd wiring layer on a glass substrate in order. CONSTITUTION:An insulating layer 2 is formed on a glass substrate 1, and an ITO film is formed thereupon and patterned to form a 1st wiring layer 3. Then a ferroelectric layer 4 is formed thereupon and an Al layer is formed thereupon and patterned to form a 2nd wiring layer 5. A dielectric film 4 is formed not directly on the glass substrate 1, but on the insulating layer 2, so the adhesive strength is increased. Therefore, even when vibration is caused by stress generated between the 1st wiring layer 3 and 2nd wiring layer 5 by the application of an AC voltage, sufficient adhesive strength is obtained at the peripheral part of the device active part 6, not to mention the device active part 6, thereby eliminating the possibility that the dielectric layer 4 is peeled off.
Inventors:
HATTA ATSUSHI
Application Number:
JP11137991A
Publication Date:
November 26, 1992
Filing Date:
May 16, 1991
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G02F1/1333; G02F1/136; G02F1/1365; (IPC1-7): G02F1/1333; G02F1/136
Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)
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