Title:
ACTIVE MATRIX LIQUID CRYSTAL DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2514166
Kind Code:
B2
Abstract:
PURPOSE: To attain complete ohmic contact between a conductive transparent electrode and polycrystalline silicon containing source and drain regions of a transistor by inserting a metal such as aluminum between these.
CONSTITUTION: A polycrystalline silicon thin film 13 is formed on a glass substrate 12 and etched to remove the area except for drain, channel and source regions of a TFT. Impurities with high concn. are diffused into the drain and source regions of the TFT. Then a silicon oxide film 14 is formed to cover the polycrystalline silicon thin film 13. A contact hole is formed in the silicon oxide film 14 on the drain area to form a window to lead a drain electrode. An aluminum thin film 15 is formed to wholly cover the contact hole. Then a conductive transparent material such as tin oxide or indium oxide is formed as a liquid crystal driving electrode on the whole surface and patterned to obtain a liquid crystal driving electrode having a desired pattern. The polycrystalline silicon 13 in the drain region is come into contact with the transparent electrode 16 through the aluminum 15.
Inventors:
KODAIRA TOSHIMOTO
Application Number:
JP6723094A
Publication Date:
July 10, 1996
Filing Date:
April 05, 1994
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G02F1/136; G02F1/1368; H01L21/336; H01L29/78; H01L29/786; (IPC1-7): G02F1/136; H01L21/336; H01L29/786
Domestic Patent References:
| JP5437697A | ||||
| JP558026A |
Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)