Title:
ACTIVE MATRIX SUBSTRATE AND X-RAY IMAGING PANEL EQUIPPED WITH THE SAME
Document Type and Number:
Japanese Patent JP2019134009
Kind Code:
A
Abstract:
To provide a technology capable of suppressing the intrusion of moisture into an active matrix substrate used in an X-ray imaging device.SOLUTION: In an active matrix substrate 1, each pixel P1 includes: a photoelectric conversion element 12 having a pair of electrodes and a semiconductor layer provided between the pair of electrodes; a first planarizing film 106 covering the photoelectric conversion element 12 and configured of an organic resin film; and a first inorganic insulating film 107 covering the first planarizing film 106. The first planarizing film 106 and the first inorganic insulating film 107 are provided to the outside of the pixel region. In the outside of the pixel region, the first planarizing film 106 is covered with the first inorganic insulating film 107 so that the first planarizing film 106 is not exposed.SELECTED DRAWING: Figure 5
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Inventors:
NAKAZAWA ATSUSHI
TOMIYASU KAZUHIDE
NAKANO FUMIKI
NAKAMURA TOMO
TOMIYASU KAZUHIDE
NAKANO FUMIKI
NAKAMURA TOMO
Application Number:
JP2018013286A
Publication Date:
August 08, 2019
Filing Date:
January 30, 2018
Export Citation:
Assignee:
SHARP KK
International Classes:
H01L27/146; G01T1/20; H01L27/144; H04N5/32; H04N5/369
Attorney, Agent or Firm:
Kawakami Keiko
Takao Matsuyama
Chiaki Otsuka
Takao Matsuyama
Chiaki Otsuka