Title:
ACTIVE MATRIX TYPE DISPLAY DEVICE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2004165598
Kind Code:
A
Abstract:
To provide a low-cost display device, provided with an active matrix substrate having a thin film transistor circuit of high performance.
An amorphous silicon film 104 of a pixel part of the active matrix substrate 101, constituting the display device, is selectively irradiated with a laser beam 208 to reform into a polysilicon film 105. A pixel circuit, such as a thin film transistor is formed on the reformed polysilicon film 105.
Inventors:
KIKUCHI HIROSHI
HONGO MIKIO
HATANO MUTSUKO
OKURA OSAMU
HONGO MIKIO
HATANO MUTSUKO
OKURA OSAMU
Application Number:
JP2003063044A
Publication Date:
June 10, 2004
Filing Date:
March 10, 2003
Export Citation:
Assignee:
HITACHI DISPLAYS LTD
International Classes:
G02F1/1368; H01L21/20; H01L21/268; H01L21/336; H01L29/786; (IPC1-7): H01L21/336; G02F1/1368; H01L21/20; H01L21/268; H01L29/786
Attorney, Agent or Firm:
Yoji Onodera