PURPOSE: To provide a vibration omission device capable of favourably controlling itself against slight vibration while absorbing position slippage at the time of assembling.
CONSTITUTION: A piezo actuator 5Z constituted by interposing more than three layers of a shearing force absorption member 15 consisting of a metal plate 13 and a thin elastic body 14 which is thin in wall thickness on an end surface of a laminated type piezo element 10 in the drive direction is provided free to drive respectively in three dimensional directions between a lower part frame and an equipment installation board. Thereafter, a vibration sensor to detect vibration in the three dimensional directions is provided, and a control device to output a drive signal to cancel vibration to the piezo actuator 5Z in accordance with the vibration detected by the vibration sensor is provided.
IMAZAWA TAMIO
TAKAHASHI YOSHINORI
YOSHIOKA HIROKAZU
FUJITA TAKASHI
SHIBUYA SADAO
HAYATSU MASAKI
TAKESHITA AKIJI
HAYAKAWA TAHEI
YASUDA MASASHI
FUJITA TAKASHI
HITACHI PLANT ENG & CONSTR CO
HITACHI KENSETSU SEKKEI KK
TOKKYO KIKI KK
JPH02246382A | 1990-10-02 | |||
JPH03219141A | 1991-09-26 |