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Title:
ACTIVE VIBRATION OMISSION DEVICE
Document Type and Number:
Japanese Patent JPH05149379
Kind Code:
A
Abstract:

PURPOSE: To provide a vibration omission device capable of favourably controlling itself against slight vibration while absorbing position slippage at the time of assembling.

CONSTITUTION: A piezo actuator 5Z constituted by interposing more than three layers of a shearing force absorption member 15 consisting of a metal plate 13 and a thin elastic body 14 which is thin in wall thickness on an end surface of a laminated type piezo element 10 in the drive direction is provided free to drive respectively in three dimensional directions between a lower part frame and an equipment installation board. Thereafter, a vibration sensor to detect vibration in the three dimensional directions is provided, and a control device to output a drive signal to cancel vibration to the piezo actuator 5Z in accordance with the vibration detected by the vibration sensor is provided.


Inventors:
MURAI NOBUYOSHI
IMAZAWA TAMIO
TAKAHASHI YOSHINORI
YOSHIOKA HIROKAZU
FUJITA TAKASHI
SHIBUYA SADAO
HAYATSU MASAKI
TAKESHITA AKIJI
HAYAKAWA TAHEI
YASUDA MASASHI
Application Number:
JP34202791A
Publication Date:
June 15, 1993
Filing Date:
November 29, 1991
Export Citation:
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Assignee:
TAKENAKA KOMUTEN CO
FUJITA TAKASHI
HITACHI PLANT ENG & CONSTR CO
HITACHI KENSETSU SEKKEI KK
TOKKYO KIKI KK
International Classes:
F16F15/02; G05D19/02; (IPC1-7): F16F15/02; G05D19/02
Domestic Patent References:
JPH02246382A1990-10-02
JPH03219141A1991-09-26
Attorney, Agent or Firm:
Tsutomu Sugitani



 
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