Title:
ACTIVE VIBRATION REDUCTION
Document Type and Number:
Japanese Patent JP2005233189
Kind Code:
A
Abstract:
To reduce vibration of a vacuum pump system and inside the vacuum pump system.
In the pump system 400 equipped with an active magnetic bearing 490, the magnetic bearing 490 induces vibration in anti-phase with an unwanted vibration so that the total vibration in the pump system 400 is reduced. Due to this, the magnetic bearing 490 in one pump 410 can cancel vibration from another pump 430.
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Inventors:
HUNTLEY GRAEME
Application Number:
JP2005044116A
Publication Date:
September 02, 2005
Filing Date:
February 21, 2005
Export Citation:
Assignee:
BOC GROUP INC
International Classes:
F04B39/00; F04B53/00; F04D19/04; F04D25/16; F04D29/048; F04D29/66; F04D29/056; F16C32/04; F16C39/06; F16F15/02; (IPC1-7): F04D19/04; F04D25/16; F04D29/04; F04D29/66; F16C32/04
Domestic Patent References:
| JP2003328940A | 2003-11-19 |
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Minako Matsuyama
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Minako Matsuyama
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