Title:
アクチュエータアレイおよびアクチュエータアレイの駆動方法
Document Type and Number:
Japanese Patent JP4947153
Kind Code:
B2
Inventors:
Shozo Odera
Yoshiaki Kono
Yoshiaki Kono
Application Number:
JP2009547943A
Publication Date:
June 06, 2012
Filing Date:
October 14, 2008
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H02N11/00; B25J19/00; H01L41/08; H01L41/09; H01L41/187; H01L41/193
Domestic Patent References:
| JP2000224875A | 2000-08-11 | |||
| JPH09201079A | 1997-07-31 | |||
| JPH09308271A | 1997-11-28 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki