To provide an actuator device capable of improving a long term reliability by repeatedly driving a piezoelectric element while being able to certainly prevent the piezoelectric element from peeling off out of a substrate, and to provide a method of manufacturing the actuator device, as well as a liquid injection head.

The actuator device includes: a lower electrode 60 provided on a substrate under a displaceable condition; and a piezoelectric element 300 consisting of a piezoelectric layer 70 and an upper electrode 80, wherein the lower electrode 60 is constituted by an adhesion layer 61 provided on the substrate and a conductive layer 62 formed on the adhesion layer 61, the adhesion layer 61 is constituted by a metal material which is hard to diffuse to the conductive layer 62 in forming the piezoelectric layer 70 while having an adhesiveness with the substrate, and the conductive layer 62 is constituted by a metal material in which titanium is diffused in platinum.

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