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Title:
ACTUATOR DEVICE, TESTING APPARATUS AND TESTING METHOD
Document Type and Number:
Japanese Patent JP2013229985
Kind Code:
A
Abstract:

To provide an actuator device that dispenses with an individual adjustment of a control voltage.

The actuator device provided includes: an actuator driven under the application of a driving voltage to one end and a reference potential to the other end; a first setting section connected to the one end of the actuator to set an operating speed of the actuator; and a second setting section disposed between the one end of the actuator and the reference potential to set the driving voltage of the actuator. The actuator device may further include an input terminal to which an external control voltage is applied, and the first setting section may have a first resistive element connected between the input terminal and the one end of the actuator.


Inventors:
ABE SACHIKAZU
HORI HISAO
SATO YOSHIHIRO
Application Number:
JP2012099774A
Publication Date:
November 07, 2013
Filing Date:
April 25, 2012
Export Citation:
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Assignee:
ADVANTEST CORP
International Classes:
H02N2/00; H01H57/00; H01L41/09; H01L41/18; H01L41/187; H01L41/22
Domestic Patent References:
JPH10107335A1998-04-24
JPH05183209A1993-07-23
JPS63167684A1988-07-11
JP2001017916A2001-01-23
JP2008091167A2008-04-17
JP2007504608A2007-03-01
JP2008175639A2008-07-31
JP2008253077A2008-10-16
JPH09182466A1997-07-11
JP2001133473A2001-05-18
JPH10107335A1998-04-24
JPH05183209A1993-07-23
JPS63167684A1988-07-11
JP2001017916A2001-01-23
JP2008091167A2008-04-17
JP2007504608A2007-03-01
JP2008175639A2008-07-31
Attorney, Agent or Firm:
Longhua International Patent Service Corporation