Title:
ACTUATOR DRIVER
Document Type and Number:
Japanese Patent JPH0794575
Kind Code:
A
Abstract:
PURPOSE: To realize smooth drive control of actuator.
CONSTITUTION: The actuator driver comprises an actuator 1, means 2 for detecting the driving speed of the actuator 1, means for determining the difference between the current speed and a target speed of the actuator 1, and means 3 for receiving the speed difference and outputting a driving signal for the actuator 1, wherein the I/O characteristics of the driving signal generating means 3 exhibit integration characteristics of first degree or above.
Inventors:
MORISADA MASAHIRO
Application Number:
JP25752693A
Publication Date:
April 07, 1995
Filing Date:
September 22, 1993
Export Citation:
Assignee:
CANON KK
International Classes:
B23Q5/22; B23Q5/28; G05D13/62; G11B21/08; H01L21/68; (IPC1-7): H01L21/68; G05D13/62
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)
Next Patent: ELECTROSTATIC ATTRACTER