To provide an actuator of which the maximum electrostatic capacity is made large by reducing the influence of warpage of a beam, and, moreover, in which steep variation in the electrostatic capacity around the maximum electrostatic capacity is relaxed, and to provide electronic equipment using the actuator.
The actuator includes: a first beam extending from a first fixed end to a first connection end; a first fixed part connecting the first fixed end and a substrate, and supporting the first beam above a main surface of the substrate while keeping a gap therebetween; a second beam extending from a second connection end to a first acting end, provided in parallel with the first beam, and having a fist division part divided by a first slit extending from the first acting end toward the second connection end; a first connection part connecting the first connection end and the second connection end, and supporting the second beam above the main surface of the substrate while keeping the gap therebetween; and a first fixed electrode opposed to part of the first acting end side of the first division part, and provided on the main surface of the substrate.
NAGANO TOSHIHIKO
ITAYA KAZUHIKO
KAWAKUBO TAKASHI
