Title:
アクチュエータ装置、試験装置、およびアクチュエータ制御方法
Document Type and Number:
Japanese Patent JP5485799
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an actuator device which accurately controls location of an actuator.SOLUTION: An actuator device comprises an actuator which operates according to a control signal and a control part which provides the control signal for setting the temperature of the actuator as reference temperature when operating the actuator, a test device, and an actuator control method are provided. It also comprises a temperature detection part which detects the temperature of the actuator. The temperature detection part detects the temperature of the actuator, and the control part controls the size of the control signal provided to the actuator according to the temperature detected by the temperature detection part.
Inventors:
Takeshi Tanaka
Yoshikazu Abe
Takashi Watanabe
Yoshikazu Abe
Takashi Watanabe
Application Number:
JP2010124661A
Publication Date:
May 07, 2014
Filing Date:
May 31, 2010
Export Citation:
Assignee:
Advantest Corporation
International Classes:
H01H61/00; B81B3/00; H01L41/09; H01L41/12; H02N13/00; F03G7/00; F03G7/06
Domestic Patent References:
| JP2008067549A | ||||
| JP63061731U |
Foreign References:
| WO2008038339A1 |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation