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Title:
アクチュエータ、流体制御装置、および、アクチュエータの製造方法
Document Type and Number:
Japanese Patent JP7351407
Kind Code:
B2
Abstract:
A first power supply member and a second power supply member are arranged on the same side of a first member in a thickness direction of an actuator. The first power supply member includes a first external connection terminal. The second power supply member includes a second external connection terminal. The first external connection terminal and the second external connection terminal are arranged on the same positions in the thickness direction. A second insulating layer is arranged between the second power supply member and a frame body. A far end side portion on an opposite side to a side, on which the first external connection terminal protrudes, in the first power supply member is bent toward the frame body to be electrically connected with the frame body.

Inventors:
Nobutaku Tanaka
Application Number:
JP2022508083A
Publication Date:
September 27, 2023
Filing Date:
January 12, 2021
Export Citation:
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Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
B06B1/06; F04B43/02; H10N30/06; H10N30/20; H10N30/87
Domestic Patent References:
JP2017133507A
JP2008173546A
JP2000184496A
Foreign References:
WO2011145544A1
Attorney, Agent or Firm:
Patent Attorney Kaede International Patent Office