Title:
投影露光システム用の少なくとも1つの磁石を有するアクチュエータ、その製造方法、及び磁石を有する投影露光システム
Document Type and Number:
Japanese Patent JP5411296
Kind Code:
B2
Abstract:
The present disclosure relates to an actuator for projection exposure systems that include a magnet. The magnet is encapsulated and/or supported in a magnet holding plate that is produced by microtechnical production methods so that a moving manipulator surface is held in the magnet holding plate via monolithic or bonded connections without additional connecting material so that there is a secure connection.
Inventors:
Armin Velvel
Norbert Muhlberger
Almut Tsap
Jurgen Fisher
Norbert Muhlberger
Almut Tsap
Jurgen Fisher
Application Number:
JP2011548661A
Publication Date:
February 12, 2014
Filing Date:
February 02, 2010
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B7/182; G02B7/198; G02B26/08
Domestic Patent References:
| JP2003166080A | ||||
| JP2004281654A | ||||
| JP2005243882A | ||||
| JP2006049758A | ||||
| JP2007017562A | ||||
| JP2007300791A | ||||
| JP2009020219A |
Foreign References:
| WO2009104962A1 |
Attorney, Agent or Firm:
Kenji Sugimura
Groundwork Kenichi
Tsubouchi Shin
Groundwork Kenichi
Tsubouchi Shin