To provide an actuator capable of accurately elevating, lowering and rotating a rod while making compact on the whole and reducing manufacturing cost.
The actuator 1 includes the rod 2, a slide driving unit 5 configured to slide the rod 2, a rotary driving unit 6 configured to rotate the rod 2, a slide position detection unit 3 configured to detect a slide-directional displacement amount of the rod 2, and an angle detection unit 7 configured to detect the angle of rotation of the rod 2. The slide driving unit 5 is a linear actuator, and comprises: a moving magnet 22 provided to the rod 2; and a linear motor coil 21 disposed enclosing an outer circumferential surface of the rod 2 not in contact therewith. The slide position detection unit 3 is a linear sensor, and comprises: a magnetic mark 16 disposed on the rod 2; and a hollow cylinder type sensor head 17 disposed enclosing the outer circumferential surface of the rod 2 not in contact therewith.
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WATANABE HIROMITSU
JP2000114282A | 2000-04-21 | |||
JP2002307360A | 2002-10-23 | |||
JP2003139563A | 2003-05-14 | |||
JPH07266154A | 1995-10-17 |