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Patent Searching and Data


Title:
ACTUATOR
Document Type and Number:
Japanese Patent JP2010165925
Kind Code:
A
Abstract:

To provide an actuator capable of accurately elevating, lowering and rotating a rod while making compact on the whole and reducing manufacturing cost.

The actuator 1 includes the rod 2, a slide driving unit 5 configured to slide the rod 2, a rotary driving unit 6 configured to rotate the rod 2, a slide position detection unit 3 configured to detect a slide-directional displacement amount of the rod 2, and an angle detection unit 7 configured to detect the angle of rotation of the rod 2. The slide driving unit 5 is a linear actuator, and comprises: a moving magnet 22 provided to the rod 2; and a linear motor coil 21 disposed enclosing an outer circumferential surface of the rod 2 not in contact therewith. The slide position detection unit 3 is a linear sensor, and comprises: a magnetic mark 16 disposed on the rod 2; and a hollow cylinder type sensor head 17 disposed enclosing the outer circumferential surface of the rod 2 not in contact therewith.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
YOSHIBA JUNICHIRO
WATANABE HIROMITSU
Application Number:
JP2009007850A
Publication Date:
July 29, 2010
Filing Date:
January 16, 2009
Export Citation:
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Assignee:
MURATA MACHINERY LTD
International Classes:
H01L21/52; H02K33/16
Domestic Patent References:
JP2000114282A2000-04-21
JP2002307360A2002-10-23
JP2003139563A2003-05-14
JPH07266154A1995-10-17
Attorney, Agent or Firm:
Satoshi Morimoto