PURPOSE: To generate large displacement at low driving voltage, and to obtain a piezoelectric/electrostrictive actuator at the fast speed of response by disposing a plurality of strip electrodes on a substrate and piezoelectric/electrostrictive drive sections composed of a piezoelectric/electrostrictive material between said electrodes.
CONSTITUTION: A plurality of strip electrodes extended in the cross direction of a substrate 2 are formed onto one surface of the longitudinal substrate 2 in specified width in a striped shape at regular intervals. Piezoelectric/ electrostrictive drive sections 6 consisting of a predetermined piezoelectric/ electrostrictive material are formed among these strip electrodes 4, 4. 60μm or less are preferable in order to relatively acquire large displacement at low driving voltage as the pitches of the electrodes. 20μm or more are favorable as the thickness of the electrodes. When electricity is conducted among the strip electrodes 4, 4 of an actuator having such structure, an electric field works to the piezoelectric/electrostrictive drive sections 6, strain is induced, and flexing displacement in the direction vertical to the board surface of the substrate 2 or generating force is developed.
JP2977685 | [Title of Invention] Ultrasonic Motor |
JP5658481 | Ultrasonic motor |
JPH03139177 | ULTRASONIC MOTOR |
KOMAZAWA MASATO
JPS5270787A | 1977-06-13 | |||
JPS63107469A | 1988-05-12 |
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