PURPOSE: To enhance driving force drastically by filling the gap between first and second electrodes with a material having high dielectric constant and applying a voltage between the first and second electrodes thereby displacing a movable member.
CONSTITUTION: An actuator mainly comprises a glass substrate 1, a silicon 2, a movable section(thin silicon film) 3 and an electrode 4. A fluid material having high dielectric constant is mixed with a solid state powder having high dielectric constant to produce a fluid material 5 which is placed between the electrodes. When a voltage is applied between the first and second electrodes, the first or the second electrode can be displaced. Consequently, driving force is enhanced drastically and a device which is conventionally moved only with a faint force can function as an actuator.
MURAKAMI KAKUJI
NAGAI KIYOFUMI
HORIIE MASANORI
IZUMI KOJI
OYAMAGUCHI AKIRA
