Title:
アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置
Document Type and Number:
Japanese Patent JP5834431
Kind Code:
B2
Abstract:
An actuator includes a base made of silicon and including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion, an insulating layer provided on a surface of the base, and a conductive portion having conductivity and provided on the insulating layer. In a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.
Inventors:
Yasushi Mizoguchi
Application Number:
JP2011058556A
Publication Date:
December 24, 2015
Filing Date:
March 16, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B81B3/00; B81C1/00; G02B26/08
Domestic Patent References:
| JP2010102147A | ||||
| JP2009069341A | ||||
| JP2011048074A | ||||
| JP2003302586A |
Foreign References:
| US20020114053 |
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi